Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry

Comparison of the moire two-beam phase-stepping and Fourier transform method techniques in Fizeau interferometry

Author(s):

Dorrrio,B.V. ( Univ.de Vigo(Spain) )

Lopez,C. ( Univ.de Vigo(Spain) )

Alen,J.M. ( Univ.de Vigo(Spain) )

Bugarin,J. ( Univ.de Vigo(Spain) )

Fernandez,A. ( Univ.de Vigo(Spain) )

Doval,A.F. ( Univ.de Vigo(Spain) )

Blanco-Garcia,J. ( Univ.de Vigo(Spain) )

Perez-Amor,M. ( Univ.de Vigo(Spain) )

Fernandez,J.L. ( Univ.de Vigo(Spain) )

4 more

Publication title:

Optical inspection and micromeasurements II : 16-19 June 1997, Munich, FRG

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3098

Pub. Year:

1997

Page(from):

18

Page(to):

26

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425188 [0819425184]

Language:

English

Call no.:

P63600/3098

Type:

Conference Proceedings

Details

TDL ID:	ZA00020194
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : Optical Inspection and Micromeasurements
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	Munich, FRG
Conf. info. (Date):	1997.06.16-1997.06.19

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