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MEMS actuators and micropositioners for integrated micro-optics (Invited Paper)

Author(s):
  • Lee,S.-S. ( Univ.of California/Los Angeles )
  • Fan,L.S. ( Univ.of California/Los Angeles )
  • Wu,M.C. ( Univ.of California/Los Angeles )
Publication title:
Micro-optics integration and assemblies : 29-30 January 1998, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3289
Pub. Year:
1998
Page(from):
152
Page(to):
162
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427281 [0819427284]
Language:
English
Call no.:
P63600/3289
Type:
Conference Proceedings

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