Characterization of pattern density and the metal stack composition on chlorine residues from the metal etch process
- Author(s):
- Loong,S.Y. ( National Univ.of Singapore and Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Lee,H.K. ( National Univ.of Singapore )
- Zhou,M.S. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Chan,L.H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Premachandran,V. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
- Publication title:
- Multilevel Interconnect Technology II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3508
- Pub. Year:
- 1998
- Page(from):
- 170
- Page(to):
- 180
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429674 [0819429678]
- Language:
- English
- Call no.:
- P63600/3508
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Characterization of polymer formation during Si02 etching with different fluorocarbon gases (CHF3,CF4,C4F8)
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Characterization of gate electrode etch process for 0.25 ヲフm extended to 0.18 ヲフm
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Effects of Y2O3 on the Piezoelectric Properties of PSN-PMN-PZT Composition under Various Alternating Electric Fields
Trans Tech Publications |
9
Conference Proceedings
Direct Formation of C54 Phase on the Basis of C40 TiSi2 and Its Applications in Deep Sub-Micron Technology
Materials Research Society |
4
Conference Proceedings
Steep retrograde indium channel profiling for high-performance nMOSFETs device fabrication
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Fabrication of bandgap-tuned lasers in GaAS/AlGaAs Structure using sol-gel Si02-induced quantum well intermixing
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Effect of etch pit density of InP substrate on the stability of InGaAs/InGaAsP quantum well laser materials
SPIE - The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |