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Spectroellipsometric study of optical and electrical properties of buried CoSi2 layers in silicon produced by MEYVA implantation

Author(s):
  • Guo,W. ( Sichuan Union Univ.(China) )
  • Wong,S. ( Chinese Univ.of Hong Kong )
  • Zhu,Z. ( Sichuan Union Univ.(China) )
Publication title:
Automated optical inspection for industry: theory, technology, and applications II : 16-19 September, 1998, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3558
Pub. Year:
1998
Page(from):
561
Page(to):
570
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430199 [0819430196]
Language:
English
Call no.:
P63600/3558
Type:
Conference Proceedings

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