Large area uniform deposition of YBa2Cu3O7 thin films by a 90o off-axis sputtering technique

Large area uniform deposition of YBa2Cu3O7 thin films by a 90o off-axis sputtering technique

Author(s):

Rao, R.A. ( Department of Mechanical Eng. and Materials Science, Duke University )
Gan, Q. ( Department of Mechanical Eng. and Materials Science, Duke University )
Eom, C.B. ( Department of Mechanical Eng. and Materials Science, Duke University )

Publication title:

Epitaxial oxide thin films II : symposium held November 26-30, 1995, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

401

Pub. Year:

1996

Page(from):

423

Page(to):

428

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558993044 [1558993045]

Language:

English

Call no.:

M23500/401

Type:

Conference Proceedings

Details

TDL ID:	ZA00020157
Series ID:	PA00000011
Conf. info. (Name):	Symposium on epitaxial oxide thin films
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.26-1995.11.30

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