Ta and TaN Adhesion to High Temperature Fluorinated Polyimides. Surface and Interface Chemistry
- Author(s):
- Lee, K. -W. ( IBM T.J. Watson Research Center )
- Simonyi, E.
- Jahnes, C.
- Publication title:
- ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia
- Title of ser.:
- Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
- Ser. no.:
- 45(2)
- Pub. Year:
- 1999
- Vol.:
- 2
- Page(from):
- 2221
- Page(to):
- 2225
- Pages:
- 5
- Pub. info.:
- Brookfield Center, CT: Society of Plastics Engineers, Inc. (SPE)
- ISBN:
- 9781566768047 [1566768047]
- Language:
- English
- Call no.:
- S42700/45-2
- Type:
- Conference Proceedings
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