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STM Nanolithography and Characterization of Passivated Silicon and Gallium Arsenide

Author(s):
Dagata J. A.  
Publication title:
Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
264
Pub. Year:
1994
Page(from):
189
Page(to):
196
Pages:
8
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792327943 [0792327942]
Language:
English
Call no.:
N11482/264
Type:
Conference Proceedings

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