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Low Voltage E-Beam Lithography with the Scanning Tunneling Microscope

Author(s):
Marrian C. R. K.
Perkins F. K.
Brandow S. L.
Koloski T. S.
Dobisz E. A.
Calvert J. M.
1 more
Publication title:
Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
264
Pub. Year:
1994
Page(from):
175
Page(to):
188
Pages:
14
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792327943 [0792327942]
Language:
English
Call no.:
N11482/264
Type:
Conference Proceedings

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