X-Ray Nanolithography: Limits, and Applications to Sub-100 nm Manufacturing
- Author(s):
- Publication title:
- Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 264
- Pub. Year:
- 1994
- Page(from):
- 103
- Page(to):
- 119
- Pages:
- 17
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792327943 [0792327942]
- Language:
- English
- Call no.:
- N11482/264
- Type:
- Conference Proceedings
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