Fabrication of Ultrasmall InGaAs/InP Nanostructures by High Voltage Electron Beam Lithography and Wet Chemical Etching

Fabrication of Ultrasmall InGaAs/InP Nanostructures by High Voltage Electron Beam Lithography and Wet Chemical Etching

Author(s):

Ils P.

Publication title:

Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies

Title of ser.:

NATO ASI series. Series E, Applied sciences

Ser. no.:

264

Pub. Year:

1994

Page(from):

77

Page(to):

80

Pages:

4

Pub. info.:

Dordrecht: Kluwer Academic Publishers

ISSN:

0168132X

ISBN:

9780792327943 [0792327942]

Language:

English

Call no.:

N11482/264

Type:

Conference Proceedings

Details

TDL ID:	ZA00020104
Series ID:	PA00000018
Conf. info. (Name):	NATO Advanced Research Workshop on Nanolithography : a Borderland between STM, EB, IB, and X-Ray Lithographies
Conf. info. (Number):	1993
Conf. info. (Venue):	Frascati, Roma, Italy
Conf. info. (Date):	1993.04.06-1993.04.08

Similar Items:

1 Conference Proceedings OPTICAL PROPERTIES OF InGaAs/InP QUANTUM WIRES DEFINED BY HIGH VOLTAGE ELECTRON BEAM LITHOGRAPHY AT 200 kV Ils, P., Michel, M., Forchel, A., Gyuro, I., Speier, P., Zielinski, E. Materials Research Society	7 Conference Proceedings Fabrication of surface gratings in GaAs and AlGaAs by electron beam lithography and chemically assisted ion beam etching Dienelt,J., Otte,K., Zimmer,K., Pietag,F., Bigl,F. SPIE - The International Society for Optical Engineering
2 Conference Proceedings LUMINESCENCE STUDY OF WET CHEMICALLY ETCHED InP/InGaAs SUBMICRON-STRUCTURES Jacobs, B., Zull, H., Forchel, A., Gyuro, I., Speier, P., Zielinski, E. Materials Research Society	8 Conference Proceedings Fabrication and Optical Pumping of Laser Cavities Made by Cleaving and Wet Chemical Etching Stocker, D., Schubert, E. F., Grieshaber, W., Redwing, J. M., Boutros, K. S., Flynn, J. S., Vaudo, R. P. MRS - Materials Research Society
3 Conference Proceedings Micro- and Nanostructures Fabrication Using Electron Beam Lithography Nascimento, K. S., Santos, E. J. P. Electrochemical Society	9 Conference Proceedings Chemically amplified resists for electron-beam projection lithography mask fabrication Magg,C., Lercel,M.J. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching Pan, Y., Ning, Y., Qin. L., Suo, H., Liu, Y., Wang, L. SPIE-The International Society for Optical Engineering	10 Conference Proceedings *MATERIALS AND DEVICE CHARACTERISTICS OF PSEUDOMORPHIC A1GaAS-InGaAs-GaAs AND A1 InAs-InGaAs-InP HIGH ELECTRON MOBILITY TRANSISTORS Ballingall, J.M., Ho, Pin, Tessmer, G.J., Martin, P.A., Yu, T.H., Chao, P.C., Smith, P.M., Duh, K.H.G. Materials Research Society
5 Conference Proceedings Single-crystal silicon nanostructure fabrication by scanning probe lithography and anisotropic wet etching Chang, K.M., You, K.S., Wu, C.H., Sheu, J.T. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Fabrication of multilevel diffractive elements in SiO2 by electron-beam lithography and proportional etching Laakkonen,P., Lautanen,J., Simonen,J., Turunen,J.P., Leppanen,V.-P., Jaaskelainen,T. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Fabrication of InP/InGaAs-based Nanostructures Adesida, I., Panepucci, R., Gu, S., Turnbull, D.A., Bishop, S.G. Electrochemical Society	12 Conference Proceedings Low-voltage electron-beam lithography linked to photolithography L. Bauch, M. Böttcher, U. Haak, U.A. Jagdhold Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12