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Numerical simulation of the surface melt dynamics in excimer laser crystallization of a-Si films on glass for TFT applications

Author(s):
Publication title:
High-Power Lasers in Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3888
Pub. Year:
2000
Page(from):
229
Page(to):
235
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434869 [0819434868]
Language:
English
Call no.:
P63600/3888
Type:
Conference Proceedings

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