Manufacture of aluminium micromirror arrays using a dual damascene process

Manufacture of aluminium micromirror arrays using a dual damascene process

Author(s):

Publication title:

Miniaturized Systems with Micro-Optics and MEMS

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3878

Pub. Year:

1999

Page(from):

416

Page(to):

424

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434753 [0819434752]

Language:

English

Call no.:

P63600/3878

Type:

Conference Proceedings

Details

TDL ID:	ZA00019945
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Miniaturized Systems with Miccro-Optics and MEMS
Conf. info. (Number):	1999
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.09.20-1999.09.21

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