Micromirror arrays fabricated by flip-chip assembly
- Author(s):
- Michalicek,M.A. ( Univ.of Colorado/Boulder )
- Zhang,W.
- Harsh,K.F.
- Bright,V.M.
- Lee,Y.C.
- Publication title:
- Miniaturized Systems with Micro-Optics and MEMS
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3878
- Pub. Year:
- 1999
- Page(from):
- 68
- Page(to):
- 79
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434753 [0819434752]
- Language:
- English
- Call no.:
- P63600/3878
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Design and testing of polysilicon surface-micromachined piston micromirror arrays
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Fabrication of five-level ultraplanar micromirror arrays by flip-chip assembly
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Flip-chip integration of lenslet arrays on segmented deformable micromirrors
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
4
Conference Proceedings
Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Development of advanced second-generation micromirror devices fabricated in a four-level planarized surface-micromachined polycrystalline silicon process
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |