Low-temperature approaches for fabrication of high-frequency microscanners
- Author(s):
Hiller,K. ( Chemnitz Univ.of Technology ) Hahn,R. Kaufmann,C. Kurth,S. Kehr,K. Gessner,T. Dotzel,W. Wiemer,M. Schubert,I. - Publication title:
- Miniaturized Systems with Micro-Optics and MEMS
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3878
- Pub. Year:
- 1999
- Page(from):
- 58
- Page(to):
- 66
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434753 [0819434752]
- Language:
- English
- Call no.:
- P63600/3878
- Type:
- Conference Proceedings
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