Modeling of laminar e-beam source for SCALPEL

Modeling of laminar e-beam source for SCALPEL

Author(s):

Waskiewicz,W.K. ( Lucent Technologies/Bell Labs. )
Liddle,J.A.
Katsap,V.

Publication title:

Charged particle optics IV : 22-23 July 1999, Denver, Colorado

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3777

Pub. Year:

1999

Page(from):

60

Page(to):

64

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432636 [0819432636]

Language:

English

Call no.:

P63600/3777

Type:

Conference Proceedings

Details

TDL ID:	ZA00019936
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Charged particle optics
Conf. info. (Number):	1999 : 4th
Conf. info. (Venue):	Denver, CO, USA
Conf. info. (Date):	1999.07.22-1999.07.23

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