Control of Mo/Si multilayers for soft x-ray performance
- Author(s):
- Kriese,M.D. ( Osmic Inc. )
- Fournier,G.
- Rodriguez,J.
- Platonov,Y.Y.
- Publication title:
- EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3767
- Pub. Year:
- 1999
- Page(from):
- 242
- Page(to):
- 250
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432537 [0819432539]
- Language:
- English
- Call no.:
- P63600/3767
- Type:
- Conference Proceedings
Similar Items:
Society of Vacuum Coaters |
7
Conference Proceedings
UV sub-ps laser pulse patterning of Mo/Si and W/Si multilayers for soft x-ray gratings
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
X-ray reflectivity and mechanical stress in W/Si multilayers deposited on thin substrates of glass,epoxy-replicated aluminum foil,and Si wafer
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Deposition of x-ray multilayers on long-size substrates for synchrotron applications
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Radiation-hydrodynamics, spectral, and atomic physics modeling of laser-produced plasma EUVL light sources
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Multilayer-coated soft x-ray diffraction gratings for synchrotron radiation applications
SPIE-The International Society for Optical Engineering |