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Recent advances in EUV phase-shifting point diffraction interferometry

Author(s):
Naulleau,P. ( Lawrence Berkeley National Lab. )
Goldberg,K.A.
Lee,S.H.
Chang,C.C.
Batson,P.J.
Attwood,D.T.,Jr.
Bokor,J.
2 more
Publication title:
EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3767
Pub. Year:
1999
Page(from):
154
Page(to):
163
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432537 [0819432539]
Language:
English
Call no.:
P63600/3767
Type:
Conference Proceedings

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