Surface shape measurement of tilted surfaces by wavelength scanning interferometry

Author(s):

• Yamamoto,A. ( RIKEN-Institute of Physical and Chemical Research )
• Yamaguchi,I.
• Yano,M.

Publication title:

Interferometry '99 : applications : 20-23 September 1999, Pułtusk, Poland

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3745

Pub. Year:

1999

Page(from):

32

Page(to):

39

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432278 [081943227X]

Language:

English

Call no.:

P63600/3745

Type:

Conference Proceedings