Fabrication and deflection measurement of micromirrors supported by an S-shape girder
- Author(s):
- Kim,H. ( Chung-Ang Univ. )
- Kim,J.-K.
- Kim,Y.-K.
- Shin,H.-J.
- Publication title:
- Diffractive and holographic technologies, systems, and spatical light modulators VI : 27-29 January 1999, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3633
- Pub. Year:
- 1999
- Page(from):
- 139
- Page(to):
- 147
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431035 [0819431036]
- Language:
- English
- Call no.:
- P63600/3633
- Type:
- Conference Proceedings
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