Blank Cover Image

Implementation and performance of a femtosecond laser mask repair system in manufacturing

Author(s):
Publication title:
18th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3546
Pub. Year:
1998
Page(from):
477
Page(to):
484
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430076 [0819430072]
Language:
English
Call no.:
P63600/3546
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings MARS2: an advanced femtosecond laser mask repair tool

Wagner, A., Haight, R.A., Longo, P.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Femtopulse laser-based mask repair in the DUV wavelength regime [6283-43]

Ghadiali, F., Tolani, V., Nagpal, R., Robinson, T., LeClaire, J., Bozak, R., Lee, A. D., White, R.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair (invited Paper)

Haight, R., Wagner, A., Longo, P., Lim, D.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Performance of the ALTA 3500 scanned-laser mask lithography system

Buck,P.D., Buxbaum,A.H., Coleman,T.P., Tran,L.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Mask defect reduction through automated pellicle mounting

Wistrom, R. E., Hayden, D., Neary, T.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Laser mask repair system LM700A

Ueda,A., Yoshino,Y., Morishige,Y., Watanabe,S., Kyusho,Y., Haneda,T., Ohmiya,M.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Application of photolithographic simulation and a mask repair system in a production environment [6283-45]

Robinson, T., Lewellen, J., Bozak, R., Lee, A. D., Brooker, P.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Photomask repair using an advanced laser-based repair system (MARS2)

Schmidt, M.R., Flanigan, P., Thibault, D.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings DUV printability of laser repairs on binary and attenuated phase-shift masks

Reynolds,J.A., Schellenberg,F.M., Hibbs,M.S., Hayden,D.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Practical laser mask repair in the contemporary production environment

T. Robinson, R. White, M. Archuletta, R. Bozak

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Integration of photolithographic simulation and a mask repair system into a single concurrent work cell [5992-50]

Robinson, T., Brooker, P., Bozak, R., Lee, D. A.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Femtosecond laser materials processing

Stuart,B.C., Banks,P.S., Perry,M.D., Feit,M.D., Lee,R.S., Roeske,F., Armstrong,J.P., Nguyen,H.T., Sefcik,J.A.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12