Mechanical properties and adhesion of PZT thin films for MEMS

Author(s):

• Jungk, J. M.
• Crozier, B. T.
• Bandyopadhyay, A.
• Moody, N. R.
• Bahr, D. F.

Publication title:

Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

594

Pub. Year:

2000

Page(from):

225

Pub. info.:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995024 [1558995021]

Language:

English

Call no.:

M23500/594

Type:

Conference Proceedings