Application of Neutron Depth Profiling to Microelectronic Materials Processing

Application of Neutron Depth Profiling to Microelectronic Materials Processing

Author(s):

Publication title:

Microelectronics processing : inorganic materials characterization

Title of ser.:

ACS symposium series

Ser. no.:

295

Pub. Year:

1986

Page(from):

163

Pub. info.:

Washington, DC: American Chemical Society

ISSN:

00976156

ISBN:

9780841209343 [0841209340]

Language:

English

Call no.:

A05800/295

Type:

Conference Proceedings

Details

TDL ID:	ZA00019862
Series ID:	PA00000004
Conf. info. (Name):	Symposium on Microelectronics Processing
Conf. info. (Number):	1986
Conf. info. (Date):	1986.00.00

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