Blank Cover Image

MICROSTRUCTURAL EXAMINATION OF EXTENDED CRYSTAL DEFECTS IN SILICON SELECTIVE EPITAXIAL GROWTH (SEG)

Author(s):
Publication title:
Defect-interface interactions : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
319
Pub. Year:
1994
Page(from):
195
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992184 [1558992189]
Language:
English
Call no.:
M23500/319
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Single Crystal Silicon Cantilever Beams and Microstructures Formed by Epitaxial Lateral Overgrowth

Kabir, Abul E., Neudeck, Gerold W.

Electrochemical Society
7 Conference Proceedings Selective Epitaxial Growth of SiGe Films in LPCVD Reactor Systems- Characterization of SiGe Films by Ellipsometry

Lee, I.M., Wang, W.C., Koh, M.T.K., Denton, J.P., Takoudis, C.G., Kram, E.P., Neudeck, G.W.

Electrochemical Society
2 Conference Proceedings RAPID THERMAL CHEMICAL VAPOR DEPOSITION: SELECTIVE EPITAXIAL SILICON GROWTH (SEG)

Osenback, J. W., Ku, Y. H., Kermani, A.

Materials Research Society
8 Conference Proceedings Defect Structures in Gap/Si

Samavedam, Srikanth B., Kvam, Eric P., Ford, Greg, Wessels, Bruce W., Chin, T. P., Woodall, Jerry M.

MRS - Materials Research Society
3 Conference Proceedings NUCLEATION OF DISLOCATIONS IN STRAINED EPITAXIAL LAYERS

Kvam, Eric

Materials Research Society
9 Conference Proceedings Dislocation Arrays in the Interfaces Between Substrates and Epitaxial Islands

Lakshmanan, Annamalai, Gopal, Vidyut, King, Alexander H., Kvam, Eric P.

Materials Research Society
4 Conference Proceedings Misfit Dislocation Introduction During the Epitaxial Growth of InAs Islands on GaP

Gopal, Vidyut, Vasiliev, Alexander L., Kvam, Eric P.

Materials Research Society
10 Conference Proceedings Electrical Impact of SiC Structural Crystal Defects on High Electric Field Devices

Neudeck, P. G.

Trans Tech Publications
5 Conference Proceedings Single-crystal silicon beams formed by merged epitaxial lateral overgrowth (MELO) for optical reflectors

G.W. Neudeck, A.E. Kabir

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings 15a. Biomems and Bionanotechnology and Applications to Diagnostics

Rashid Bashir

American Institute of Chemical Engineers
6 Conference Proceedings Electron-Transport Rates in an Enzyme Electrode for Glucose

Surridge, Nigel A., Diebold, Eric R., Chang, Julie, Neudeck, Gerold W.

American Chemical Society
12 Conference Proceedings 3-D Silicon-on-Insulator (SQl) Technologies Using Epitaxial Lateral Overgrowth (ELO) (Invited)

Neudeck, G.W.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12