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Effects of Ion Metal Plasma (IMP) Titanium Deposition on Ti Silicide Formation

Author(s):
Sabbadini, A.
Cazzaniga, F.
Brambilla, M.
Bresolin, C.
Cusi, V.
Marangon, T.
Queirolo, G.
2 more
Publication title:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
564
Pub. Year:
1999
Page(from):
23
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994713 [1558994718]
Language:
English
Call no.:
M23500/564
Type:
Conference Proceedings

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