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Selective Area Growth (SAG) and Epitaxial Lateral Overgrowth (ELO) of GaN Using Tungsten Mask

Author(s):
Kawaguchi, Y.
Nambu, S.
Sone, H.
Yamaguchi, M.
Miyake, H.
Hiramatsu, K.
Sawaki, N.
Iyechika, Y.
Maeda, T.
4 more
Publication title:
GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
537
Pub. Year:
1999
Page(from):
G4.1.1
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994430 [1558994432]
Language:
English
Call no.:
M23500/537
Type:
Conference Proceedings

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