Blank Cover Image

Effect of Thermal Treatment on the Hardness and Fracture Toughness of Sputter Deposited Bi-Layered Thin Films on Silicon

Author(s):
Publication title:
Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
516
Pub. Year:
1998
Page(from):
325
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994225 [155899422X]
Language:
English
Call no.:
M23500/516
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings On the Influence of Titanium Alloy Composition and Layer Thickness on the Mechanical Properties of a Polyimide Substrate

Muralidharan, G., Narayanan, B., Wong, C. C., Manoharan, M.

MRS - Materials Research Society
7 Conference Proceedings Effect of substrate temperature on optical properties of EB-PVD-deposited silicon oxynitride thin films

Mohite, K.C., Nouveau, C., Pawar, S.T., Pawar, B.N., Jadkar, S.R., Takwale, M.G.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings On the Interaction Between Indentation Cracks on Metallized Silicon

Manoharan, M., Muralidharan, G.

MRS - Materials Research Society
8 Conference Proceedings Effect of RF Power on the Properties of Magnetron Sputtered ZnO:Al Thin Films Deposited at Room Temperature

M. Selmi, F. Chaabouni, M. Abaab, B. Rezig

Trans Tech Publications
3 Conference Proceedings The Dependence of Indentation Cracking in Silicon on Indentation Spacing and Relative Orientation

Manoharan, M., Muralidharan, G.

MRS - Materials Research Society
9 Conference Proceedings Modelling of Substrate Bias Effect on the Compositional Variations in Sputter-Deposited TiB2+x Diffusion Barrier Thin Films

Sinder, M., Sade, G., Pelleg, J.

MRS - Materials Research Society
4 Conference Proceedings Fracture Toughness of Titanium - Titanium Nitride Multi-Layer Thin Film

Mohan Prasad Manoharan, Amit Desai, Amanul Haque

American Society of Mechanical Engineers
10 Conference Proceedings MEASUREMENT OF FRACTURE TOUGHNESS IN THIN FILMS AND SMALL VALUMES USING NANOINDENTATION METHODS

Pharr M. G., Harding S. D., Oliver C. W.

Kluwer Academic Publishers
5 Conference Proceedings FRACTURE TOUGHNESS OF SILICON AND THIN FILM MICRO-STRUCTURES BY WEDGE INDENTATION

Boer, M. P. de, Huang, He, Nelson, J. C., Jiang, Z. P., Gerberich, W. W.

MRS - Materials Research Society
11 Conference Proceedings Sputter-deposited c-axis-oriented LiNbO3 thin films on silicon

Tan,S., Zou,J., Stancil,D.D., Schlesinger,T.E., Migliuolo,M.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-Based Infrared Detectors

I-Kuan Lin, Ping-Hsin Wu, Kuang-Shun Ou, Kuo-Shen Chen, Xin Zhang

Materials Research Society
12 Conference Proceedings Annealing Effect on the Performance of Sputtering Deposited Metglas Thin Films

C. Liang, J. Hu, B.C. Prorok, C. Gooneratne, J. Kosel

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12