Blank Cover Image

Defect Generation and Diffusion Mechanisms in Al and Al-Cu

Author(s):
Publication title:
Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
516
Pub. Year:
1998
Page(from):
189
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994225 [155899422X]
Language:
English
Call no.:
M23500/516
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Stress effects on Al and Al(Cu) thin film grain-boundary diffusion

Liu, X-Y., Liu, C-L.

MRS-Materials Research Society
7 Conference Proceedings Multiple Toughening Mechanisms of Laminated Ti-TiBw/Ti Composites Fabricated by Diffusion Welding

B.X. Liu, L. Geng, X.L. Dai, F.X. Yin, L.J. Huang

Trans Tech Publications
2 Conference Proceedings Formation mechanism of defects in annealed lnP

Han,Y., Liu,X., Jiao,J., Lin,L.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Photobiomodulation: phenomenology and its mechanism (Invited Paper)

Liu, T. C-Y., Jiao, J.-L., Xu, X.-Y., Liu, X.-G., Deng, S.-X., Liu, S.-H.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings DIFFUSION MECHANISMS AND NONEQUILIBRIUM DEFECTS IN Si

Mathiot, D., Pfister, J. C.

Materials Research Society
9 Conference Proceedings Research on HfSiN Diffusion Barrier Thin Film for Micro-Nanoscale ULSI-Cu Metallization

X.M. Liu, X.H. Chen, Y.Q. Han, W.H. Ma, J.L. He

Trans Tech Publications
4 Conference Proceedings A Study of Mechanisms of Enhanced Diffusion of Boron During Rapid Thermal Processing (RTP)

Park, H., Merchant, T., Loechelt, G., Ren, J., Borucki, L., Christiansen, J., Egan, E.

Electrochemical Society
10 Conference Proceedings The Metastable Si:(S + Cu)Defect

Jeyanathan,L., Davies,G., Lightowlers,E.C., Singh,M., Sun,H.J., Ittermann,B., Ostapenko,S.S., Barry,W.A., Mason,P., …

Trans Tech Publications
5 Conference Proceedings Atomic-Defect Mechanisms for Diffusion in Refractor BCC Metals

Siegel,R.W., Mundy,J.N., Smedskjaer,L.C.

Trans Tech Publications
11 Conference Proceedings Mechanism of endogenetic chromophore mediated photo-damage and its applications [6026-09]

Liu T. C.-Y., Liu J., Cui L.-P., Xu X.-Y., Lu J., Liu S.-H.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Diffusion Studies Of Cu In Si And Low-K Dielectric Materials

Prasad, K., Yuan, X.L., Tan, C.M., Zhang, D.H., Li, C. Y., Wang, S.R., Yuan, S.Y.J., Xie, J.L., Gui, D., Foo, P.D.

Materials Research Society
12 Conference Proceedings Characterization of CVD TixCyNz Films Deposited as Diffusion Barriers for Cu on Low-k Dielectrics Methylsilsequiazane

Gau, W. C., Liu, P. T., Chang, T. C., Chen, L. J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12