The Effect of Deposition Conditions on the Properties of Vapor-Deposited Parylene AF-4 Films

The Effect of Deposition Conditions on the Properties of Vapor-Deposited Parylene AF-4 Films

Author(s):

Publication title:

Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

476

Pub. Year:

1997

Page(from):

213

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993808 [1558993800]

Language:

English

Call no.:

M23500/476

Type:

Conference Proceedings

Details

TDL ID:	ZA00019841
Series ID:	PA00000011
Conf. info. (Name):	Symposium on low-dielectric constant materials
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1997.04.01-1997.04.04

Similar Items:

1 Conference Proceedings Parylene AF-4: A Low ｦﾅR Material Candidate for ULSI Multilevel Interconnect Applications Harrus, A. S., Plano, M. A., Kumar, D., Kelly, J. MRS - Materials Research Society	7 Conference Proceedings DEPTH-RESOLVED RESIDUAL STRESS MEASUREMENTS IN HOMOEPITAXIAL DIAMOND FILMS GROWN BY CHEMICAL VAPOR DEPOSmON Ager III, J.W., Plano, M.A., Moyer, D. Electrochemical Society
2 Conference Proceedings VAPOR DEPOSITION OF PARYLENE FILMS FROM PRECURSORS You, L., Yang, G.-R., Lang, C-I., Wu, P., Moore, J.A., McDonald, J.F., Lu, T.-M. Materials Research Society	8 Conference Proceedings VAPOR DEPOSITED THIN FILMS AND THEIR DENSIFICATION DURING ION BEAM ASSISTED DEPOSITION Andreadis, T.D, Rosen, Mervine, Haftel, M.I., Sprague, J.A. Materials Research Society
3 Conference Proceedings H-Atom Assisted Jet Vapor Deposition of Parylene-N Polymer Halpern, B. L., Komarenko, P., Graves, R. F., Fuqua, P. D., McDonald, J. F., Yang, G-R., Wang, L., Lu, T. M., Tomozawa, … MRS - Materials Research Society	9 Conference Proceedings Wave Polymerization During Vapor Deposition of Porous Parylene-N Dielectric Films Beaudoin, S. P., Erjavec, J., Raupp, G. B., Sikita, J. Materials Research Society
4 Conference Proceedings Correlation of Electrical Properties With Defects in a Homoepitaxial Chemical-Vapor-Deposited Diamond Han, S., Rodriguez, G., Taylor, A., Plano, M. A., Moyer, M. D., Moreno, M. A., Pan, L. S., Black, D. B., Burdette, H., … MRS - Materials Research Society	10 Conference Proceedings Deposition of Potassium Niobate Thin Films by Metalorganic Chemical Vapor Deposition and Their Nonlinear Optical Properties Nystrom, M. J., Wessels, B. W., Chen, J., Studebaker, D., Marks, T. J., Lin, W. P., Wong, G. K. MRS - Materials Research Society
5 Conference Proceedings Effect of Deposition and Annealing on the Thermomechanical Properties of Parylene Films Ryan, E. Todd, Miller, Mikel, Ho, Paul S. MRS - Materials Research Society	11 Conference Proceedings The effect of oxygen deposition pressure on the structure and properties of pulsed laser deposited LaxCa1-xMnOdelta films Horwita, J.S., Dorsey, P.C., Koon, N.C., Rubinstein, M., Byers, J.M., Gillespie, D.J., Osofsky, M.S., Harris, V.G., … Materials Research Society
6 Conference Proceedings Chemical Vapor Deposition (CVD) of Parylene Films Using Liquid Source Delivery Xu, C., Baum, T. H. MRS - Materials Research Society	12 Conference Proceedings MECHANICAL AND OPTICAL PROPERTIES OF THIN FILMS OF TANTALUM OXIDE DEPOSITED BY ION-ASSISTED DEPOSITION Martin, P. J., Bendavid, A., Swain, M. V., Netterfield, R. P., Kinder, T. J., Sainty, W. G., Drage, D. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12