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Chemical Mechanical Polishing of Polymer Films: Comparison of Benzocyclobutene(BCB) and Parylene-N Films by XPS and AFM

Author(s):
Publication title:
Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
476
Pub. Year:
1997
Page(from):
161
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993808 [1558993800]
Language:
English
Call no.:
M23500/476
Type:
Conference Proceedings

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