Preliminary Electrical Characterization of Pulsed-Plasma-Enhanced Chemical Vapor-Deposited Teflonlike Thin Films

Preliminary Electrical Characterization of Pulsed-Plasma-Enhanced Chemical Vapor-Deposited Teflonlike Thin Films

Author(s):

Publication title:

Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

443

Pub. Year:

1997

Page(from):

189

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993471 [1558993479]

Language:

English

Call no.:

M23500/443

Type:

Conference Proceedings

Details

TDL ID:	ZA00019838
Series ID:	PA00000011
Conf. info. (Name):	Symposium on low-dielectric constant materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1996.12.02-1996.12.03

Similar Items:

1 Conference Proceedings Pulsed Plasma Enhanced Chemical Vapor Deposition from CH2F2, C2H2F4, and CHClF2 Labelle, Catherine B., Lau, Kenneth K. S., Gleason, Karen K. MRS - Materials Research Society	7 Conference Proceedings Fluorocarbon Films Vapor Deposited in the Absence of a Plasma K. Gleason Electrochemical Society
2 Conference Proceedings Influence of Fluorocarbon Precursors on Pulsed Plasma Enhanced chemical Vapor Deposition Labelle, C.B., Lau, K.K.S., Limb, S.J., Gleason, K.K. Electrochemical Society	8 Conference Proceedings Fluorocarbon Films Vapor Deposited in the Absence of a Plasma Gleason, K. Electrochemical Society
3 Conference Proceedings (3an) Design of Functional, Patternable Vapor-Deposited Polymer Thin Films Christy D. Petruczok, Karen K. Gleason American Institute of Chemical Engineers	9 Conference Proceedings Environmental, Safety and Health Issues Associated with Low Dielectric Constant Films Grown by Chemical Vapor Deposition Labelle, C.B., Gleason, K.K. Electrochemical Society
4 Conference Proceedings 662b. Applications of Thin Films of pH-Responsive Hydrogels Synthesized by Initiated ChEmical Vapor Deposition Wyatt E. Tenhaeff, Karen K. Gleason American Institute of Chemical Engineers	10 Conference Proceedings Initiated Chemical Vapor Deposition of Polymer Thin Films Kenneth K.S. Lau, Karen K. Gleason American Institute of Chemical Engineers
5 Conference Proceedings 5cw. Synthesis of Reactive Copolymer Thin Films by Initiated ChEmical Vapor Deposition and Applications Wyatt E. Tenhaeff, Karen K. Gleason American Institute of Chemical Engineers	11 Conference Proceedings (491a) Engineering the Vapor Deposition of Organic Thin Films and Devices Karen K. Gleason American Institute of Chemical Engineers
6 Conference Proceedings (530e) Initiated Chemical Vapor Deposition of Polymer Thin Films for Photolithography Applications Christy D. Petruczok, Karen K. Gleason American Institute of Chemical Engineers	12 Conference Proceedings (755a) Systematic Tuning of Cross-Linking in Vapor-Deposited Polymer Thin Films Christy D. Petruczok, Rong Yang, Karen K. Gleason American Institute of Chemical Engineers

1

2

3

4

5

6

7

8

9

10

11

12