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Electrode Materials for Ferroelectric Capacitors: Properties of Reactive DC Sputtered IrO2 Thin Films

Author(s):
Balu, Venkatasubramani
Chen, Tung-Sheng
Jiang, Bo
Kuah, Shao-Hong
Lee, Jack C.
Chu, Peir
Jones, Robert E.
Zurcher, Peter
Taylor, Deborah J.
Gillespie, Sherry
5 more
Publication title:
Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
433
Pub. Year:
1996
Page(from):
139
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993365 [1558993363]
Language:
English
Call no.:
M23500/433
Type:
Conference Proceedings

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