Blank Cover Image

Low Temperature Fabrication of (Ba,Sr)TiO3 Thin Films by ECR Plasma CVD

Author(s):
Kato, Y.
Yabuta, H.
Sone, S.
Yamaguchi, H.
Iizuka, T.
Yamamichi, S.
Lesaicherre, P-Y.
Nishimoto, S.
Yoshida, M.
4 more
Publication title:
Ferroelectric thin films V : symposium held April 7-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
433
Pub. Year:
1996
Page(from):
3
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993365 [1558993363]
Language:
English
Call no.:
M23500/433
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Phase Formation in CVD-Grown SrTiO3 and (BaSr)TiO3 Films

Yoshida, M., Yabuta, H., Sone, S., Yamaguchi, H., Arita, K., Kato, Y.

Electrochemical Society
7 Conference Proceedings Low Temperature Deposition of SiC Thin Films on Polymers Surface by ECR Plasma CVD

Sano, K., Nomura, M., Tamamaki, H., Hatanaka, Y.

Electrochemical Society
2 Conference Proceedings PREPARATION OF SrTiO3 THIN FILMS BY ECR AND THERMAL MOCVD

Lesaicherre, P-Y., Yamaguchi, H., Sakuma, T., Miyasaka, Y., Yoshida, M., Ishitani, A.

MRS - Materials Research Society
8 Conference Proceedings Incorporation of Hydrogen in SiO2 and Si3N4 Thin Films Deposited by ECR-CVD

Brown, J., Boudreau, M., Boumerzoug, M., Mascher, P., Jackman, T. E., Tong, S. Y., Haugen, H.

MRS - Materials Research Society
3 Conference Proceedings Low-Temperature Growth of Crystalline Silicon Thin Films by ECR Plasma CVD

Wang, Licai., Reehal, H. S.

MRS - Materials Research Society
9 Conference Proceedings Stress of ECR Plasma CVD Si3N4 Films on FZ-Si

Zaitsu, Y., Shimizu, T., Matsumoto, S., Yosbida, M., Abe, T., Arai, E.

Electrochemical Society
4 Conference Proceedings *INTERFACE STRUCTURE AND DIELECTRIC PROPERTIES OF SrTiO3 THIN FILM SPUTTER-DEPOSITED ONTO Si SUBSTRATES

Matsubara, S., Sakuma, T., Yamamichi, S., Yamaguchi, H., Miyasaka, Y.

Materials Research Society
10 Conference Proceedings Heteroepitaxial Growth of 3C-SiC on Si (111) at Low Substrate Temperature by Plasma Assisted CVD

H. Shimizu, A. Kato

Trans Tech Publications
5 Conference Proceedings SrTiO3 AND (Ba,Sr)TiO3 THIN FILMS PREPARATION BY ION BEAM SPUTTERING AND THEIR DIELECTRIC PROPERTIES

Yamamichi, S., Sakuma, T., Hase, T., Miyasaka, Y.

Materials Research Society
11 Conference Proceedings Low Temperature Fabrication of Polycrystalline Silicon Thin Films by ECR PECVD

Jeon, Y.C., Lee, S.W.

Electrochemical Society
6 Conference Proceedings Low Temperature Growth of 3C-SiC Film on Si (111) by Plasma Assisted CVD

H. Shimizu, A. Kato

Trans Tech Publications
12 Conference Proceedings Low Temperature Polycrystalline Silicon Thin Films Deposited by ECR Plasma

Kalkan, A.K., Bae, S., Farber, D.G., Fonash, S.J.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12