The Influence of Hydrogen Plasma Passivation on Electrical and Optical Properties of AlGaN Samples Grown on Sapphire

The Influence of Hydrogen Plasma Passivation on Electrical and Optical Properties of AlGaN Samples Grown on Sapphire

Author(s):

Polyakov, A. Y.

Publication title:

III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

423

Pub. Year:

1996

Page(from):

607

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993266 [1558993266]

Language:

English

Call no.:

M23500/423

Type:

Conference Proceedings

Details

TDL ID:	ZA00019836
Series ID:	PA00000011
Conf. info. (Name):	Symposium on III-nitride, SiC and diamond materials for electronic devices
Conf. info. (Number):	1996
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

Similar Items:

1 Conference Proceedings Factors Influencing the Electrical and Optical Properties of AlGaN Layers on Sapphire Shin, M., Polyakov, A. Y., Skowronski, M., Greve, D. W., Wilson, R. G., Freitas, J. A. MRS - Materials Research Society	7 Conference Proceedings ELECTRICAL AND OPTICAL PROPERTIES OF VANADIUM IN OMVPE-GROWN GaAs Hobson, W. S., Pearton, S. J., Swaminathan, V., Jordan, A. S., Kao, Y. J., Haegel, M., Kanber, H. Materials Research Society
2 Conference Proceedings Studies of Electrically and Recombination Active Centers in Undoped GaN Grown by OMVPE Polyakov, A. Y., Govorkov, A. V., Smirnov, N. B., Shin, M., Skowronski, M., Greve, D. W. MRS - Materials Research Society	8 Conference Proceedings Scanning-Tunneling-Microscopy Observation of Surface Reconstruction of GaN on Sapphire and 6H-SiC Smith, A. R., Ramachandran, V., Feenstra, R. M., Greve, D. W., Neugebauer, J., Northrup, J. E., Shin, M., Skowronski, M. MRS - Materials Research Society
3 Conference Proceedings High-Resolution X-ray Diffraction Analysis of GaN-Based Heterostructures Grown by OMVPE Goorsky, M. S., Polyakov, A. Y., Skowronski, M., Shin, M., Greve, D. W. MRS - Materials Research Society	9 Conference Proceedings THE EFFECT OF HYDROGEN TREATMENT ON ELECTRICAL PROPERTIES OF A1GaAsSb Polyakov, A. Y., Stam, M., Milnes, A. G., Wilson, R. G., Bochkarev, A. E., Raichoudhyry, P., Hillard, R. J., Pearton, S. … Materials Research Society
4 Conference Proceedings Electrical Properties of Undoped 6H- and 4H-SiC Bulk Crystals Grown by Halide Chemical Vapor Deposition Chung, H.J., Huh, S.W., Polyakov, A.Y., Nigam, S., Li, Q., Grim, J., Skowronski, M., Glaser, E.R., Carlos, W.E., … Trans Tech Publications	10 Conference Proceedings Optical and Electrical Properties of Al1-xInxN Films Grown on Sapphire (0001) by Plasma Source Molecular Beam Epitaxy Danylyuk, Y.V., Lukitsch, M. J., Huang, C., Auner, G. W., Naik, R., Naik, V. M. Materials Research Society
5 Conference Proceedings DOPING EFFICIENCY AND DEEP TRAPS IN MOCVD-GROWN InGaAlP AS INFLUENCED BY STOICHI0METRY AND HYDROGEN PASSIVATION Gorbylev, V. A., Chelniy, A. A., Chekalin, A. A., Polyakov, A. Y., Pearton, S. J., Smirnov, N. B., Govorkov, A. V., … MRS - Materials Research Society	11 Conference Proceedings HYDROGEN PASSIVATION OF OXYGEN DONOR IN Si Pearton, S.J., Chantre, A.M., Kimerling, L.C., Cumming,C.D., Dautmoth-Smith, W.C. Materials Research Society
6 Conference Proceedings Growth of AlBN Solid Solution by OMVPE Shin, M., Polyakov, A. Y., Qian, W., Skowronski, M., Greve, D. W., Wilson, R. G. MRS - Materials Research Society	12 Conference Proceedings HVPE-Grown AlGaN/GaN HEMTs Luo, B., Ren, F., Mastro, M. A., Tsvetkov, D., Pechnikov, A., Soukhoveev, V., Dmitriev, V., Baik, K. H., Pearton, S. J. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12