Low Volume Resistivity Chemical Vapor Deposited Boron Doped Polycrystalline Thin Diamond Film Growth on Sapphire

Low Volume Resistivity Chemical Vapor Deposited Boron Doped Polycrystalline Thin Diamond Film Growth on Sapphire

Author(s):

Publication title:

III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

423

Pub. Year:

1996

Page(from):

589

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993266 [1558993266]

Language:

English

Call no.:

M23500/423

Type:

Conference Proceedings

Details

TDL ID:	ZA00019836
Series ID:	PA00000011
Conf. info. (Name):	Symposium on III-nitride, SiC and diamond materials for electronic devices
Conf. info. (Number):	1996
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

Similar Items:

1 Conference Proceedings Measurement of the Activation Energy in Phosphorous Doped Polycrystalline Diamond Thin Films Grown on Silicon Substrates by Hot Filament Chemical Vapor … Mirzakuchaki, S., Golestanian, H., Charlson, E. J., Stacy, T. MRS - Materials Research Society	7 Conference Proceedings The Properties of Low Pressure Chemical Vapor Deposited Boron Nitride Thin Films Dana,S.S. Trans Tech Publications
2 Conference Proceedings Growth and Characterization of Polycrystalline Diamond Thin Films on Porous Silicon by Hot Filament Chemical Vapor Deposition Mirzakuchaki, S., Charlson, E. J., Charlson, E. M., Stacy, T., Shahedipour, F., White, H. W. MRS - Materials Research Society	8 Conference Proceedings Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition Fu, X.A., Trevino, J., Mehregany, M., Zorman, C.A. Trans Tech Publications
3 Conference Proceedings HYDROGEN IN POLYCRYSTALLINE DIAMOND FILMS GROWN BY HOT FILAMENT CHEMICAL VAPOR DEPOSITION Spitsyn, B., Khasawinah, S., Sung, T., Miller, W.H., Popvici, G., Prelas, M.A., Charlson, E.J., Charlson, E.M., Meese, … Electrochemical Society	9 Conference Proceedings Determination of Boron Concentration in Doped Diamond Films S.N. Demlow, T.A. Grotjohn, T. Hogan, M. Becker, J. Asmussen Materials Research Society
4 Conference Proceedings Seeding with a Diamond Suspension for Growth of Smooth Polycrystalline Diamond Surfaces Omer, I. St., Stacy, T., Charlson, E. M., Charlson, E. J. MRS - Materials Research Society	10 Conference Proceedings EFFECTS OF SILICON IMPLANTATION AND PROCESSING TEMPERATURE ON PERFORMANCE OF POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS FABRICATED FROM LOW PRESSURE CHEMICAL … Chiang, A., Huang, T. Y., Wu, I-W., Zarzycki, M. H. Materials Research Society
5 Conference Proceedings EFFECT OF MECHANICAL STRESS ON POLYCRYSTALLINE DIAMOND SCHOTTKY DIODE I-V CHARACTERISTICS Zhao, G., Charlson, E.M., Charlson, E.J., Stacy, T., Meese, J., Popovici, G., Prelas, M. Materials Research Society	11 Conference Proceedings ELECTRONIC PROPERTIES OF BORON DOPED HOMOEPITAXIAL AND POLYCRYSTALLINE DIAMOND THIN FILMS AND NATURAL SINGLE CRYSTALS Fox, B.A., Malta, D.M., Wynands, H.A., von Windheim, J. Electrochemical Society
6 Conference Proceedings Homoepitaxially Grown Boron-Doped Diamond Thin Film Using Trimethylboron as a Dopant by Microwave Plasma-Assisted Chemical Vapor Deposition Saito, T., Ohtsubo, K., Tsuruga, S., Kameta, M., Maeda, H., Kusakabe, K., Morooka, S., Kiyota, Hideo Electrochemical Society	12 Conference Proceedings EVOLUTION OF INTRINSIC STRESS DURING NUCLEATION AND GROWTH OF POLYCRYSTALLINE TUNGSTEN FILMS BY CHEMICAL VAPOR DEPOSITION Leusink, G. J., Oosterlaken, T. G. M., Janssen, G. C. A.M., Radelaar, S. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12