Blank Cover Image

Heteroepitaxy of CoSi2 on Patterned Si(100) Substrates

Author(s):
Publication title:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
402
Pub. Year:
1996
Page(from):
481
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993051 [1558993053]
Language:
English
Call no.:
M23500/402
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings EQUILIBRIUM SHAPE OF CoSi2 IN SILICON

Adams, D. P., Yalisove, S. M., Eaglesham, D. J.

MRS - Materials Research Society
7 Conference Proceedings STRUCTURAL ANALYSIS OF PULSED LASER DEPOSITED FeSi2 FILMS

Karpenko, O. P., Olk, C. H., Doll, G. L., Mansfield, J. F., Yalisove, S. M.

MRS - Materials Research Society
2 Conference Proceedings A UHV TEM STUDY OF THE IN-SITU GROWTH OF ULTRA-THIN FILMS OF CoSi2 on Si (100)

Loretto, D., Gibson, J.M., Yalisove, S.M.

Materials Research Society
8 Conference Proceedings ISLAND FORMATION IN Ge ON Si HETEROEPITAXY

Eaglesham, D. J., Cossmann, H.-J., Cerullo, M.

Materials Research Society
3 Conference Proceedings GROWTH OF THIN EPITAXIAL CoSi2 LAYERS ON Si (100)

Yalisove, S.M., Tung, R.T., Batstone, J.L.

Materials Research Society
9 Conference Proceedings TEXTURE IN SPUTTERED Mo FILMS

Karpenko, O. P., Vill, M., Malhotra, S. G., Bilello, J. C., Yalisove, S. M.

MRS - Materials Research Society
4 Conference Proceedings BONDING IN THIN EPITAXIAL CoSi2 FILMS ON Si (100)

Chabliss, David B., Rhodin, T. N., Rowe, J. E., Yalisove, S. M

Materials Research Society
10 Conference Proceedings DEFECTS IN LARGE-MISFIT HETEROEPITAXY

Eaglesham, D.J., Aindow, M., Pond, R.C.

Materials Research Society
5 Conference Proceedings ULTRATHIN SINGLE CRYSTAL CoSi2 LAYERS ON Si (111) AND Si (100)

Tung, R. T., Batstone, J. L., Yalisove, S. M.

Materials Research Society
11 Conference Proceedings DEPTH PROFILING OF MOLYBDENUM THIN FILMS USING GRAZING INCIDENCE X-RAY SCATTERING

Malhotra, Sandra G., Rek, Z., Vill, M., Karpenko, O. P., Yalisove, S. M., Bilello, J. C.

MRS - Materials Research Society
6 Conference Proceedings LOW TEMPERATURE Si HOMOEPITAXY: EFFECTS OF IMPURITIES ON MICROSTRUCTURE

Adams, D. P., Eaglesham, D. J., Yalisove, S. M.

MRS - Materials Research Society
12 Conference Proceedings Origins of Residual Stress in Mo and Ta Films: The Role of Impurities, Microstructural Evolution, and Phase Transformations

Parfitt, L. J., Karpenko, O. P., Rek, Z. U., Yalisove, S. M., Bilello, J. C.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12