Characterization of Ultra-Thin PtSi Films for Infrared Detectors

Characterization of Ultra-Thin PtSi Films for Infrared Detectors

Author(s):

Bender, H.

Publication title:

Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

402

Pub. Year:

1996

Page(from):

449

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993051 [1558993053]

Language:

English

Call no.:

M23500/402

Type:

Conference Proceedings

Details

TDL ID:	ZA00019834
Series ID:	PA00000011
Conf. info. (Name):	Symposium on silicide thin films
Conf. info. (Number):	1995
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1995.11.27-1995.11.30

Similar Items:

1 Conference Proceedings New process for the controlled formation of ultrathin PtSi films for infrared detector applications A. Torres, S. Kolodinski, R.A. Donaton, K. Maex, P. Roussel Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Structural and Electrical Characterization of FeSix-Layers (1｡蛉｡？) Prepared by RTP of Fe Layers Sputtered on Si (100) Libezny, M., Poortmans, J., Amesz, P. H., Donaton, R. A., Larsen, K. Kyllesbech, Vandenabeele, P., Jonckx, F., Maex, K., … MRS - Materials Research Society
2 Conference Proceedings New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications Donaton, R. A., Jin, S., Bender, H., Zagrebnov, M., Baert, K., Maex, K., Vantomme, A., Langouche, G. MRS - Materials Research Society	8 Conference Proceedings The Influence of Ti Capping Layers on CoSi2 Formation in the Presence of Interfacial Oxide Detavernier, C., Donaton, R. A., Maex, K., Jin, S., Bender, H., Meirhaeghe, R. Van, Cardon, F. MRS - Materials Research Society
3 Conference Proceedings CoSi₂/Si_1-xGe_x interfaces for Schottky barrier infrared detectors with extended detection regime S. Kolodinski, R.A. Donaton, E. Roca, M. Caymax, K. Maex Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Microstructural Studies of Co Silicide Layers Formed on SiGe and SiGeC Jin, S., Bender, H., Donaton, R. A., Maex, K., Vantomme, A., Langouche, G., Amour, A. St., Sturm, J. C. MRS - Materials Research Society
4 Conference Proceedings New Approaches for Formation of Ultra-Thin PtSi Layers for Infrared Applications Donaton, Ricardo A., Jin, Sing, Bender, Hugo, Zagrebnov, Maxim, Baert, Kris, Maex, Karen, Vantomme, Andre, Langouche, … MRS - Materials Research Society	10 Conference Proceedings Influence of SiGe Thickness on the Co/SiGe/Si Solid State Reaction Donaton, R. A., Jin, S., Bender, H., Maex, K., Vantomme, A., Langouche, G. MRS - Materials Research Society
5 Conference Proceedings A BEEM Study of PtSi Schottky Contacts on Ion-Milled Si Ru, G-P., Detavernier, C., Donaton, R. A., Blondeel, A., Clauws, P., Meirhaeghe, R. L. Van, Cardon, F., Maex, K., Qu, … MRS - Materials Research Society	11 Conference Proceedings STRESS RELAXATION IN Al-Si-Cu THIN FILMS AND LINES Witvrouw, A., Proost, J., Deweerdt, B., Roussel, Ph., Maex, K. MRS - Materials Research Society
6 Conference Proceedings Electron Microscopic Studies of Co- and Ti-Germanosilicide Films Formed on SiGe Layers Jin, S., Donaton, R. A., Bender, H., Maex, K. MRS - Materials Research Society	12 Conference Proceedings Applications of a Thin Film Diffractometer Sluis,P.van der Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12