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High Concentration Erbium Implantation of Epitaxially Grown CaF2/Si Structures

Author(s):
Publication title:
Thin films for integrated optics applications : symposium held April 17-20, 1995, San Francisco, California USA/ editors: Bruce W. Wessels, Seth R. Marder, David M. Walba
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
392
Pub. Year:
1995
Page(from):
247
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992955 [1558992952]
Language:
English
Call no.:
M23500/392
Type:
Conference Proceedings

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