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MOLECULAR BEAM EPITAXY OF BORON NITRIDE THIN FILMS AND THEIR ANALYTICAL CHARACTERIZATION

Author(s):
Publication title:
Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
363
Pub. Year:
1995
Page(from):
139
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992641 [1558992642]
Language:
English
Call no.:
M23500/363
Type:
Conference Proceedings

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