Process development for 180-nm structures using interferometric lithography and i-line photoresist
- Author(s):
- Chen,X. ( Univ.of New Mexico )
- Zhang,Z.
- Brueck,S.R.J.
- Carpio,R.A.
- Petersen,J.S.
- Publication title:
- Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3048
- Pub. Year:
- 1997
- Page(from):
- 309
- Page(to):
- 318
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424624 [0819424625]
- Language:
- English
- Call no.:
- P63600/3048
- Type:
- Conference Proceedings
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