Study of cathodoluminescence spectroscopy of aluminum nitride
- Author(s):
- Hossain,F.R.B. ( Howard Univ. )
- Tang,X.
- Wongchotigul,K.
- Spencer,M.G.
- Publication title:
- Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2877
- Pub. Year:
- 1996
- Page(from):
- 42
- Page(to):
- 45
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422750 [0819422754]
- Language:
- English
- Call no.:
- P63600/2877
- Type:
- Conference Proceedings
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