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Optical characterization of amorphous and polycrystalline silicon films

Author(s):
Ibok,E. ( Advanced Micro Devices,Inc. )
Garg,S.
Li,G.G.
Forouhi,A.R.
Bloomer,I.
Ager,J.W.III
1 more
Publication title:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2877
Pub. Year:
1996
Page(from):
26
Page(to):
35
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422750 [0819422754]
Language:
English
Call no.:
P63600/2877
Type:
Conference Proceedings

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