Linesize effects on UV reflectance spectra
- Author(s):
- Ziger,D.H. ( VLSI Technology Inc. )
- Adams,T.E.
- Garofalo,J.G.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2725
- Pub. Year:
- 1996
- Page(from):
- 637
- Page(to):
- 651
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421012 [0819421014]
- Language:
- English
- Call no.:
- P63600/2725
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Swing curve prediction from reflectance spectra: a new method to predict optimal resist thicknesses and compare processes
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Complementary alignment metrology:a visual technique for alignment monitoring
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Nanoindentation and Nanowear Studies of Sputter-Deposited Ultrathin Tin Oxide Films on Glass Substrates
Materials Research Society |
Trans Tech Publications |