Managing environmentally benign semiconductor manufacturing research
- Author(s):
- Herr,D.J.C. ( Semiconductor Research Corp. )
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2725
- Pub. Year:
- 1996
- Page(from):
- 282
- Page(to):
- 288
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421012 [0819421014]
- Language:
- English
- Call no.:
- P63600/2725
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Emerging patterning materials: trends, challenges, and opportunities in patterning and materials by design
SPIE - The International Society of Optical Engineering |
American Society of Mechanical Engineers |
SPIE-The International Society for Optical Engineering |
Elsevier |
American Institute of Chemical Engineers |
Electrochemical Society |
4
Conference Proceedings
A Comparison of Probability Bounds Analysis and Sensitivity Analysis in Environmentally Benign Design and Manufacture
American Society of Mechanical Engineers |
American Institute of Chemical Engineers |
5
Conference Proceedings
Environmentally Benign Material Removal Processes for the Fabrication of Microdevices
Trans Tech Publications |
SPIE |
Trans Tech Publications |
MRS - Materials Research Society |