Development of critical dimension measurement scanning electron microscope for ULSI(S-8000 series)
- Author(s):
- Ezumi,M. ( Hitachi,Ltd. )
- Otaka,T.
- Mori,H.
- Todokoro,H.
- Ose,Y.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2725
- Pub. Year:
- 1996
- Page(from):
- 105
- Page(to):
- 113
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819421012 [0819421014]
- Language:
- English
- Call no.:
- P63600/2725
- Type:
- Conference Proceedings
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