Submicron patterning of AlSiCu/TiN and AlSiCu/TiW films
- Author(s):
- Chooi,S.Y.M. ( Chartered Semiconductor Manufacturing Pte Ltd. )
- Gn,F.-H.
- Chan,L.
- Publication title:
- Microelectronic Device and Multilevel Interconnection Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2636
- Pub. Year:
- 1995
- Page(from):
- 266
- Page(to):
- 276
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420022 [0819420026]
- Language:
- English
- Call no.:
- P63600/2636
- Type:
- Conference Proceedings
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