Parametral dependence of bilevel-interconnect formation in GaAs ICs/MMICs

Parametral dependence of bilevel-interconnect formation in GaAs ICs/MMICs

Author(s):

Vinayak,S. ( Solid State Physics Lab. )

Publication title:

Microelectronic Device and Multilevel Interconnection Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2636

Pub. Year:

1995

Page(from):

252

Page(to):

263

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420022 [0819420026]

Language:

English

Call no.:

P63600/2636

Type:

Conference Proceedings

Details

TDL ID:	ZA00019786
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Microelectronic Manufacturing : Microelectronic Device and Multilevel Interconnection Technology
Conf. info. (Number):	1995
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1995.10.25-1995.10.26

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