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Silicon surface defects:the roles of passivation and surface contamination

Author(s):
Reddy,A.J.
Burr,T.A.
Chan,J.K.
Norga,G.J.
Michel,J.
Kimerling,L.C.
1 more
Publication title:
Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997
Title of ser.:
Materials science forum
Ser. no.:
258-263
Pub. Year:
1997
Vol.:
Part3
Page(from):
1719
Page(to):
1724
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878497898 [0878497897]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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