Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication:Technology and Damage Characterization
- Author(s):
- Publication title:
- Plasma properties, deposition and etching
- Title of ser.:
- Materials science forum
- Ser. no.:
- 140-142
- Pub. Year:
- 1993
- Page(from):
- 641
- Page(to):
- 658
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878496709 [087849670X]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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