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Bonding Configuration and Defects in Glow-Discharge Amorphous SiNx:H Films Deposited at 300°C and 500°C

Author(s):
Publication title:
Plasma properties, deposition and etching
Title of ser.:
Materials science forum
Ser. no.:
140-142
Pub. Year:
1993
Page(from):
335
Page(to):
358
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496709 [087849670X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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