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Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applications

Author(s):
Publication title:
Adaptive optical system technologies : 23-26 March, 1998, Kona, Hawaii
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3353
Pub. Year:
1998
Vol.:
pt. 2
Page(from):
805
Page(to):
815
Pub. info.:
Bellingham, Wash.: SPIE
ISSN:
0277786X
ISBN:
9780819428004 [0819428000]
Language:
English
Call no.:
P63600/3353
Type:
Conference Proceedings

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